METHOD OFGAS-DYNAMIC SPUTTERING OF POWDER MATERIALS AND FACILITY FOR ITS REALISATION Russian patent published in 2009 - IPC C23C24/04 B05B7/06 

FIELD: metallurgy.

SUBSTANCE: invention relates to method of gas-dynamic sputtering of powder materials and facility for its realisation and can be used in mechanical engineering for receiving of plating imparting various properties to processing surfaces. Method includes feeding of powder materials with different properties simultaneously through different drive assemblies of powder materials into supersonic part of nozzle and providing of optimum sputtering mode to each powder material. Main drive unit of powder materials is implemented with the ability of separate feeding of different powder materials simultaneously into subsonic and/or supersonic parts of nozzle. Additional drive assemblies are implemented in the form of throw away member located co-axial lengthwise supersonic part of nozzle one after another with ability of telescopic movement relative to each other and supersonic nozzle. The first additional assembly is mounted in outlet of supersonic nozzle with clearance relative to its external wall and with formation of annular channel for feeding of powder material, and following assemblies are mounted with clearance relative to external walls of each other so that each following additional assembly forms with preceding annular channel for feeding of powder materials.

EFFECT: broadening of functional and manufacturing capability of the method and facility.

6 cl, 1 dwg