METHOD FOR GAS DYNAMIC SPUTTERING OF POWDER MATERIALS AND DEVICE FOR GAS DYNAMIC SPUTTERING OF POWDER MATERIALS (VERSIONS) Russian patent published in 2012 - IPC C23C24/04 

Abstract RU 2468123 C2

FIELD: metallurgy.

SUBSTANCE: compressed gas supplied from a source (1) is heated in an electric heater (4). With a supply unit (5) it is sent into a sonic nozzle of permanent section (6), and a swirled gas flow is formed in the nozzle with a swirler (7), arranged in a forechamber (8) of the nozzle. Particles of the powder material are supplied into the flow, accelerated in the nozzle and applied onto the surface. The nozzle at the outlet has two flat asymmetrical cuts. Spraying is carried out with a flat jet of a gas powder flow with an opening angle equal to β=40÷90°, which is formed by the specified configuration of the output section of the sonic nozzle.

EFFECT: expanded process capabilities of gas dynamic sputtering due to increased width of a sputtering strip and reduced prime cost.

6 cl, 15 dwg

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RU 2 468 123 C2

Authors

Kosarev Vladimir Fedorovich

Klinkov Sergej Vladimirovich

Zajkovskij Viktor Nesterovich

Melamed Boris Mikhajlovich

Trubacheev Georgij Viktorovich

Dates

2012-11-27Published

2010-10-01Filed