METHOD OF PRODUCING MONOCRYSTALS OF CALCIUM AND BARIUM FLOURIDES Russian patent published in 2010 - IPC C30B11/02 C30B33/02 C30B29/12 

Abstract RU 2400573 C1

FIELD: chemistry.

SUBSTANCE: method involves crystallisation from molten mass through Stockbarger method and subsequently annealing the crystals through continuous movement of the crucible with molten mass from the upper crystallisation zone to the lower annealing zone while independently controlling temperature of both zones which are separated by a diaphragm. The crucible containing molten mass moves from the crystallisation zone to the annealing zone at 0.5-5 mm/h. Temperature difference between the zones is increased by changing temperature in the annealing zone proportional to the time in which the crucible moves from the beginning of crystallisation to its end, for which, while maintaining temperature in the upper crystallisation zone preferably at 1450-1550°C, in the lower annealing zone at the beginning of the crystallisation process temperature is kept at 1100-1300°C for 30-70 hours, thereby ensuring temperature difference of 450°C between the zones at the beginning. Temperature of the annealing zone is then lowered to 500-600°C in proportion to the speed of the crucible with the growing crystal. Temperature of the annealing zone is then raised again to 1100-1300°C at a rate of 20-50°C/h, kept for 18-30 hours after which the zone is cooled to 950-900°C at a rate of 2-4°C/h, and then at a rate of 5-8°C/h to 300°C. Cooling to room temperature is done inertially. Output of suitable monocrystals of calcium and barium fluorides with orientation on axes <111> and <001>, having high quality of transparency, uniformity, refraction index and double refraction is not less than 50%.

EFFECT: high output of suitable high-quality optical monocrystals for making photolithography optical elements.

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RU 2 400 573 C1

Authors

Garibin Evgenij Andreevich

Demidenko Aleksej Aleksandrovich

Mironov Igor' Alekseevich

Krutov Mikhail Anatol'Evich

Dates

2010-09-27Published

2009-03-16Filed