FIELD: physics.
SUBSTANCE: in the receiver, a bi-material cantilever is formed from films of materials with different coefficients of thermal expansion. Therefore the free part of the cantilever moves relative the substrate when temperature changes. Reading of this displacement enables imaging temperature distribution of the object under observation. The element used to read displacement of the free part of the cantilever is a MIS transistor whose gate is attached to the cantilever, while the source and drain lie in the substrate. Electrodes are also attached behind the cantilever for electrostatic control of the initial position of the cantilever relative the substrate. The gap between the gate and the substrate and the electrostatic control electrodes and the substrate is smaller than that between the cantilever and the substrate.
EFFECT: increased sensitivity of the receiver and possibility of reducing area of the photosensitive cell.
2 cl, 3 dwg
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Authors
Dates
2010-10-20—Published
2009-05-26—Filed