FIELD: process engineering.
SUBSTANCE: invention relates to nanotechnology, namely to producing nanoparticles in ion fluid. Proposed method comprises adding ion fluid into deposition chamber and vapour deposition of one or more materials. Proposed device comprises deposition chamber and ion fluid vessel. The latter has inlet and outlet to feed ion fluid in and withdraw it from aforesaid vessel.
EFFECT: simple method, higher quality of produced particles.
29 cl, 16 dwg, 7 ex
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