FIELD: information technology.
SUBSTANCE: invention discloses a method of configuring a specific group of plasma processing apparatus with multiple modules, which involves provision for a set of files for defining module options, where the files for defining the module options contain main configuration definitions for the main group of plasma processing apparatus, provision for a set of protective information for specific apparatus, where the protective information for specific apparatus contains data which particularly define that group of plasma processing apparatus for which configuration is meant, and provision for set of option specifications for specific apparatus. The set of option specifications for specific apparatus indicates options defined for a specific group of plasma processing apparatus. The method also involves generation of a key file, where key file encapsulates restrictions on configuring a specific group of plasma processing apparatus. The key file is configured in such a way that it necessary when choosing configuration of a specific plasma apparatus.
EFFECT: universal tool for configuring grouped apparatus.
7 cl, 10 dwg
