FIELD: physics.
SUBSTANCE: there is a central diaphragm (106) in cavities (132, 134) of a pressure sensor (56). The sensor (56) is connected through a data bus (66) to an electronic board having a microcomputer. The diaphragm can create first and second capacitors with the first wall of the cavity and third and fourth capacitors with the second wall of the cavity, which vary with the applied pressure. The capacitors form a first and second transfer function. The microcomputer gives out diagnosis information in form of variation of the transfer function of the capacitive pressure sensor, which is a function of the first and second transfer functions of capacitors of the sensor. The diagnostic output information for the faulty pressure sensor includes detection of leakages of the central diaphragm, loss of contact of electrodes, contamination, loss of electrical connection and damage to wire leads.
EFFECT: invention increases measurement accuracy owing to timely detection of imminent fault of the sensor.
20 cl, 9 dwg
Authors
Dates
2010-12-27—Published
2007-01-22—Filed