FIELD: measuring equipment.
SUBSTANCE: differential pressure sensor (56) for measuring the differential pressure of the process fluid includes a sensor body (114. 116) having a sensor cavity (132, 134) formed in it by a cavity profile. Diaphragm (106) the sensor cavity deflects in response to the applied differential pressure. The diaphragm (106) has a diaphragm profile. The gap formed between the profile of the cavity and the profile of the diaphragm varies depending on the differential pressure. At least one of the profiles of the cavity or the diaphragm varies depending on the linear pressure, to compensate for changes in the gap caused by deformation of the sensor body, thereby reducing errors in the differential pressure measurements caused by the linear pressure.
EFFECT: compensation of inaccuracies when measuring differential pressure caused by the linear pressure.
21 cl, 16 dwg
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