PRESSURE SENSOR BASED ON NANO- AND MICRO-ELECTROMECHANICAL SYSTEM WITH FREQUENCY-DOMAIN OUTPUT SIGNAL Russian patent published in 2011 - IPC G01L9/04 B82B1/00 

FIELD: physics.

SUBSTANCE: pressure sensor based on a nano- and micro-electromechanical system with a frequency-domain output signal has a tensoresistor sensor, a nano- and micro-electromechanical system (NMEMS) having an elastic member in form of a membrane with a base, a heterogeneous structure formed on said system, in which tensoresistors are formed and connected into a tensobridge, a frequency converter of the signal from the output of the tensobridge having a comparator and an integrator made from an operational amplifier with a first capacitor in the negative feedback circuit, whose output is connected to the first input of the first comparator, the inverting input of the operational amplifier of the integrator is connected through a second capacitor to the first apex of the power diagonal of the tensobridge and through the resistor of the integrator to one apex of the measuring diagonal of the tensobridge, and its other apex is connected to the inverting input of the operational amplifier of the integrator. The resistor of the integrator is made from the same material as the tensoresistors of the tensobridge of the sensor, mounted on the periphery of the membrane on its base. There are three extra resistors and a second comparator. Said elements are connected appropriately.

EFFECT: high accuracy of converting the offset signal of the tensobridge of the sensor owing to reduced temperature error by placing the resistor of the integrator on the non-deformable part of the detecting element and making it from the same material as the tensoresistors, and owing to use of a second comparator and three extra resistors.

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