FIELD: physics.
SUBSTANCE: device for measuring pressure based on a nano- and micro-electromechanical system with a frequency-domain output signal has a tensoresistive sensor in which there is a nano- and micro-electromechanical system with an elastic member in form of a membrane on which there is a heterogeneous structure from thin films of materials in which tensoresistors joined into a tensobridge are formed. A frequency converter for the signal from the output of the tensobridge has a comparator and an integrator made on an operational amplifier with a first capacitor in the negative feedback circuit, whose output is connected to the first input of the comparator between whose output and the inverting input of the operational amplifier of the integrator a second capacitor is connected. The inverting input of the operational amplifier of the integrator is connected through the first resistor of the integrator to one vertex of the measurement diagonal of the tensobridge and its other vertex is connected to the non-inverting input of the operational amplifier of the integrator and the second input of the comparator. There are two extra resistors and a second resistor for the integrator. The first extra resistor is connected between the first vertex of the diagonal for powering the tensobridge and the output of the comparator. The second extra resistor is connected to the second vertex of the diagonal for powering the tensobridge and is connected to the earthing bus. The second resistor of the integrator is connected between the inverting input of the operational amplifier of the integrator and the earthing bus.
EFFECT: higher accuracy of the device owing to the extra resistors, which also lowers the effect of the heating-up temperature of tensoresistors on the output signal and measurement due to use of a second resistor for the integrator.
2 cl, 14 dwg
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