PRESSURE MEASUREMENT DEVICE BASED ON NANO- AND MICRO-ELECTROMECHANICAL SYSTEM HAVING FREQUENCY OUTPUT Russian patent published in 2010 - IPC G01L9/04 B82B1/00 

FIELD: physics.

SUBSTANCE: pressure measurement device based on a nano- and micro-electromechanical system, having a frequency output which has a strain gauge consists of a housing in which there is a nano- and micro-electromechanical system with an elastic member in form of a membrane having a base on which there is a heterogeneous structure made from thin films of materials in which there are tensoresistors joined into a tensobridge, a frequency converter for the signal from the output of the tensobridge, having a comparator and an integrator. The integrator is made on an operational amplifier with a first capacitor in a negative feedback circuit whose output is connected to the first input of the comparator, between whose output and the inverting input of the operational amplifier of the integrator of which a second capacitor is connected. The inverting input of the operational amplifier of the integrator is connected through a first resistor to one vertex of the measuring diagonal of the tensobridge, and the other vertex is connected to the non-inverting input of the operational amplifier of the integrator and the second input of the comparator. There is voltage divider comprising two resistors, a second resistor of the integrator and an extra resistor. The voltage divider is connected in parallel to the power diagonal of the tensobridge of the sensor. The output of the voltage divider is connected through the second resistor of the integrator to the inverting input of the operational amplifier of the integrator. The first vertex of the power diagonal of the tensobridge is connected through the extra resistor to the output of the comparator, and the second vertex is connected to an earth bus. The extra resistor consists of two parts.

EFFECT: broader functionalities of the pressure measurement device based on a nano- and micro-electromechanical system, having a frequency output, and high accuracy of converting a disbalance signal of the tensobridge of the sensor owing to reduced effect of tensoresistor heating temperature on the output signal.

3 cl, 17 dwg