MICROMECHANICAL SENSOR OF ANGULAR SPEED Russian patent published in 2011 - IPC G01P9/04 G01P15/00 

FIELD: measurement equipment.

SUBSTANCE: invention relates to measurement equipment, and may be used to measure angular speed, for instance, in inertial navigation systems. Micromechanical sensor of angular speed comprises base and cover, bearing frame, the first and second inertial masses fixed on elastic elements of suspension, sensors of position of each inertial mass. At the same time additionally second position sensors are introduced for each inertial mass, as well as permanent magnets, the first and second comparators, the first and second keys and source of DC, inertial masses are made of single-crystal silicon in the form of plates with rectangular optical slot each and are fixed in bearing frame with the possibility of displacement along two mutually perpendicular longitudinal and transverse axes in plane, which is parallel to base, inertial masses are arranged in gap between permanent magnets, on surface of each inertial mass, parallel to transverse axis, there are current-conducting paths sputtered.

EFFECT: increased sensitivity and expansion of measurements range.

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