MICROMECHANICAL SENSOR OF ANGULAR VELOCITY WITH DIGITAL OUTPUT Russian patent published in 2016 - IPC G01C19/5621 

FIELD: instrument making.

SUBSTANCE: invention relates to instrument making, particularly to measurement equipment, and is intended for measuring angular velocity, for example, in systems of control, navigation, stabilization and guidance. Inertial masses (1, 2), on the surface of which current-conducting paths (19, 20) are spattered, are arranged on elastic suspension elements (3, 4) in a gap between two permanent magnets (6). Position sensors consist of pairs of radiators (11, 12, 15, 16) and photodetectors (17, 18) or two-segment photodetectors (13, 14). Inertial masses (1, 2) perform self-oscillations under the action of an alternating-sign signal generated in a feedback circuit consisting of Schmidt triggers (28, 32), amplitude detectors (29, 33) and adders (27, 31). Presence of the input effect leads to displacement of the center of oscillations of the inertial masses and occurrence of a time modulation of the output signal obtained after processing by microcontroller (30).

EFFECT: technical result is higher noise immunity and measurement of angular velocities with higher accuracy and extended frequency ranges.

1 cl, 1 dwg