LINEAR MICROACCELEROMETRE Russian patent published in 2011 - IPC G01P15/08 

FIELD: measurement equipment.

SUBSTANCE: invention relates to inertial instruments and may be used in control systems of movable objects of various purpose. Microaccelerometer comprises body, cover, two inertial weights on elastic suspensions arranged in the form of rectangular plates of single-crystal silicon and arranged in one plane serially one after another along axis of sensitivity with the possibility of linear displacement. Two sensors of position for each inertial weight are arranged in the form of two pairs of radiators and photodetectors. The first of them are located in holes of cover above rectangular plates, and the second ones are arranged in body coaxially with them. At that each pair of photodetectors is connected to according comparator. Outlets of comparators are connected to keys, where a stabilised source of current is connected. Outlets of keys, via elastic suspensions, are connected to current-conducting paths of compensation converters arranged in the form of two permanent magnets on cover and body, and current-conducting paths sputtered on surface of rectangular plates, perpendicular to axis of sensitivity.

EFFECT: invention makes it possible to increase accuracy of measurement by introduction of self-excited oscillations mode.

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