RESONANCE NEAR-FIELD DEVICE FOR MICROWAVE MICROSCOPE Russian patent published in 2011 - IPC G01R27/26 

FIELD: radio engineering.

SUBSTANCE: device is a rectangular waveguide to which a microwave generator and a measurement device is connected. The device has an inductive diaphragm 2 fitted in the waveguide 1, perpendicular to the wide wall of the waveguide. A capacitive diaphragm 3 is fitted at a distance Λ/10 (Λ is the fundamental wavelength), the connection plane of which is parallel to the connection plane of the inductive diaphragm. Two rectangular metal projections 4, 5 are fitted in the space between the diaphragms in a single plane perpendicular the wide wall of the waveguide and parallel the narrow wall, where one of the projections is attached to the top half of the capacitive diaphragm and the second to the bottom half of the capacitive diaphragm. The projection 4 has ohmic contact with the top half of the capacitive diaphragm 5 with the top. The distance between the edges of the projections and the plane of the inductive diaphragm is approximately Λ/100. The distance between edges of the projections and the plane of the inductive diaphragm is selected based on the condition for resonance with low reflection coefficient arising.

EFFECT: possibility of resolution of interdigital comb structures with a period of the order of 20 micrometres or less.

3 dwg