FIELD: physics.
SUBSTANCE: proposed transducer comprises silicon membrane to measure pressure. Said membrane accommodates silicon resonator and two permanent magnets. Said resonator is made up of frame inside which flat parallel plate is suspended by webs with conducting strip evaporated on plate surface along its edges to cross one of said webs. Another web is provided with stain gage to take up web deformation in plate oscillations.
EFFECT: higher sensitivity.
2 dwg
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