FREQUENCY-RESPONSE SENSITIVE ELEMENT FOR DIFFERENTIAL PRESSURE SENSOR Russian patent published in 2019 - IPC G01L9/08 

FIELD: measurement.

SUBSTANCE: invention relates to measuring equipment, in particular to frequency-response sensitive elements (SE) for differential pressure sensors capable of accurately measuring small differences in relatively large pressures of liquid and gaseous corrosive media. In the SE containing a membrane made of an elastic material, separating the comparable pressures, on opposite surfaces of which in its central part in the zones of uniform deformations of different signs arising during its deflection, two strain-sensitive resonators (SR), hermetically sealed with protective covers with recesses are fixed, within the combined projections of the contours of which a through hole is made in the membrane, which forms, with protective covers, a common for the SR-pair, a sealed vacuum-treated or gas-filled cavity (capsule), and along the contour of the membrane, one or both of its sides are hermetically mounted with one or, respectively, two separating covers with a sample covering the portion of the measuring membrane within which resonators with protective covers are mounted, each separating cover has an opening for supplying one of the compared pressures. To prove the feasibility of the invention, samples of a frequency-resonance differential pressure sensor (FS) with single-crystal quartz SE are manufactured and successfully tested.

EFFECT: technical result is an increase in accuracy, resolution and ensuring the long-term stability of differential pressure measurements by increasing the useful pressure sensitivity and more fully neutralizing destabilizing factors: temperature, vibration, shock, aging, static pressure, including their mutual influence and other factors of "noise".

12 cl, 1 tbl, 9 dwg