FIELD: physics.
SUBSTANCE: apparatus has a beam diameter adjustment unit which adjusts the beam diameter of the measuring beam to be guided to the object; a detection unit which includes a spectroscopic unit, an image forming unit and an opto-electric conversion element array and which detects the combined beam; and a change unit which reads a signal from the opto-electric conversion element array based on a beam diameter adjusted by the beam diameter adjustment unit and changes a ratio of the number of pixels used for imaging to the wavelength bandwidth of the light source.
EFFECT: low-resolution mode for rough imaging and a high-resolution mode for obtaining detailed images, possibility of imaging during a high-resolution mode at high speeds.
9 cl, 28 dwg
