APPARATUS FOR CONTACTLESS MEASUREMENT OF LIFETIME OF NONEQUILIBRIUM CHARGE CARRIERS SEMICONDUCTORS (VERSIONS) Russian patent published in 2012 - IPC H01L21/66 

FIELD: physics.

SUBSTANCE: apparatus for contactless measurement of the lifetime of nonequilibrium charge carriers in semiconductors, having a light source with photon energy greater than the band-gap of the semiconductor under analysis, a source of probing radiation with photon energy less than the band-gap of the semiconductor under analysis, as well as a photodetector which picks up probing radiation passing through or reflected from the sample, additionally contains a radiation modulator for an optical injector which is an independent unit in the optical injector, which provides calibrated modulation frequency, and a phase difference metre, one input of which is connected to the output of the photodetector which picks up probing radiation passing through or reflected from the semiconductor sample, and the other input is connected to the modulator of the optical inductor.

EFFECT: wider range of application owing to the possibility of measuring the lifetime of nonequilibrium charge carriers in semiconductors with unknown parameter values, and high measurement accuracy.

2 cl, 3 dwg