FIELD: chemistry.
SUBSTANCE: invention relates to a method and apparatus for obtaining boron-depleted chlorosilanes from boron-containing mixtures of chlorosilanes. A boron-rich stream of distillate is separated via distillation. In a system with one or more distillation columns, a boron-rich side stream is tapped from at least one column and then recycled or taken for some other use.
EFFECT: obtaining high-purity chlorosilane fractions and reduced loss of chlorosilanes due to separation of boron-rich silane fractions.
16 cl, 5 dwg, 4 tbl, 5 ex
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