FIELD: chemistry.
SUBSTANCE: invention can be used to reduce content of boron and aluminium in commercial-purity halosilanes. The method of reducing content of boron and/or aluminium in commercial-purity halosilanes involves a step of adding halosilanes to triphenylmethyl chloride in an apparatus (2) to form low-solubility complexes, transferring the complexes into a separation unit (3) which includes a decantation unit, a centrifuging unit, a filtration unit and a distillation unit, where the complexes are mechanically separated and purified halosilanes are extracted.
EFFECT: invention enables to obtain highly pure halosilanes with residual boron content of 16-18 mcg/kg.
19 cl, 1 dwg, 1 tbl, 4 ex
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Authors
Dates
2014-01-20—Published
2008-11-20—Filed