FIELD: chemistry.
SUBSTANCE: invention can be applied for reducing boron and aluminium content in halosilanes of technical purity. Method of continuous obtaining highly pure halosilanes includes obtaining halosilanes of technical purity, which contain boron and aluminium, from metallurgical silicon, mixing of obtained halosilanes with triphenylmethylchloride in device (2) to form poorly soluble complexes, and obtaining highly pure halosilanes by distillation separation of complexes in column (3).
EFFECT: invention makes it possible to obtain highly pure halosilanes with residual quantity of boron < 5 mcg/kg.
10 cl, 1 dwg, 4 ex
| Title | Year | Author | Number |
|---|---|---|---|
| METHOD OF REDUCING CONTENT OF BORON-TYPE ELEMENTS IN HALOSILANES AND APPARATUS FOR REALISING SAID METHOD | 2008 |
|
RU2504515C2 |
| METHOD FOR PURIFYING HEXACHLORODISILANE FROM IMPURITIES OF METAL CHLORIDES | 2021 |
|
RU2759500C1 |
| CATALYST AND METHOD OF DISMUTATION OF HYDROGEN-CONTAINING HALOSILANES | 2008 |
|
RU2492924C9 |
| METHOD AND APPARATUS FOR PURIFYING TRICHLOROSILANE AND SILICON TETRACHLORIDE | 2005 |
|
RU2393991C2 |
| TREATMENT OF BORON-CONTAINING CHLOROSILANE STREAMS | 2008 |
|
RU2446099C2 |
| METHOD OF PRODUCING HIGHER SILANES | 2007 |
|
RU2470859C2 |
| METHOD FOR PRODUCING HIGH-PURITY SILICON TETRACHLORIDE | 2017 |
|
RU2672428C1 |
| METHOD OF PRODUCTION 0F TRICHLOROSILANE | 2004 |
|
RU2280010C1 |
| METHOD OF PRODUCTION OF CHLOROSILANE | 2002 |
|
RU2214363C1 |
| METHOD AND SYSTEM FOR MONOSILANE OBTAINING | 2010 |
|
RU2551493C2 |
