FIELD: process engineering.
SUBSTANCE: invention relates to micro structure technologies. Method of producing membrane filter with pore identical sizes and shape comprises irradiating polymer film and etching of material destruction products from polymer film irradiated areas. Irradiation causes local chemical destruction of polymer film material. Polymer film is subjected to synchrotron radiation. Said radiation is structurally ordered by multi-beam lattice interference lithography. Irradiation is carried out in chamber filled with gaseous hydrogen. Hydrogen reacts photochemically with polymer film material on irradiated film sections to produce volatile products removed in irradiation.
EFFECT: membrane filter porosity of up to 0,6, ordered identical-size (from 1 nm and lather) pores, round or elliptical in crosswise and conical in lengthwise sections.
14 cl, 15 dwg, 5 tbl
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