METHOD OF MEASURING TEMPERATURE, AUTOELECTRONIC EMISSION THERMOELECTRONIC-MECHANICAL TRANSDUCER AND METHOD OF MAKING SAID TRANSDUCER Russian patent published in 2012 - IPC G01K7/02 

FIELD: physics.

SUBSTANCE: changes in parameters of a heat-sensitive element due temperature change are determined and the current temperature value is determined from the value of said parameters. The heat-sensitive element used is a bimorph element which is placed in an electric field, and the current temperature value is determined from the change in emission current depending on mechanical deformation of the bimorph element due to temperature. The bimorph element used is a converter. The first layer is made from vanadium oxide and the second is made from tungsten. The autoelectronic emission thermoelectronic-mechanical transducer has one sensitive element with one semiconductor structure, and electronic circuit. The sensitive element is placed on the base of the converter with a gap from a current-conducting area on the surface of which there is at least one whisker. There is a hole in the bimorph element. Two or more bimorph elements are merged into a matrix structure on a common wafer. The electronic circuit contains electronic switches and interrogating multiplexers for rows and columns connected to a common video output.

EFFECT: wider range of measuring thermal radiation and higher accuracy of measuring temperature.

7 cl, 9 dwg