MANUFACTURING METHOD OF NANO-ELECTROMECHANICAL CONVERTER, AND NANO-ELECTROMECHANICAL CONVERTER WITH AUTOELECTRONIC EMISSION Russian patent published in 2013 - IPC G01P15/08 B81C1/00 B82B3/00 

FIELD: measurement equipment.

SUBSTANCE: first, the appropriate planar integral circuit is created; for that purpose, contact platforms are formed on reverse side of the base; then, the first conducting layer is created; after that, circuit of a sensitive element of the converter is formed and a sacrificial layer is removed, and the method is completed with formation of the converter housing and formation of whiskers. Besides, at formation of the converter housing in a closed volume of the housing, gas medium with specified parameters is created, and formation of a whisker is performed due to supply of pulses of the specified shape to electrodes. As specified parameters of the medium, for example, pressure and/or dew point are used. Pulses in the form of half-period of sine wave of the specified amplitude and frequency are supplied to electrodes.

EFFECT: unification of different types of sensors with autoelectronic emission and reduction of standard sizes of different sensors.

4 cl, 12 dwg