FIELD: electricity.
SUBSTANCE: invention refers to devices for input of ionisation energy to ionic or electronic source with inductance or inductance-capacitance excitation. This device includes arc chamber for ionised gas, coupling coil winded around arc chamber for supply of high-frequency energy required for plasma generation, coupling capacitor conductively-coupled with coupling coil, high-frequency generator conductively-coupled with coupling coil. High-frequency generator together with at least one coupling capacitor forms resonance circuit. High-frequency generator is provided with regulator with phase-locked-loop frequency control for auto-negotiation of resonance circuit complex impedance.
EFFECT: providing operation of resonance circuit with resonant frequency.
26 cl, 15 dwg
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