EXCIMER LASER Russian patent published in 2012 - IPC H01S3/225 

FIELD: physics, optics.

SUBSTANCE: invention relates to quantum electronics, particularly to compact pulse-periodic excimer lasers with UV preionisation. The excimer laser as an elongated ceramic housing which houses a gas stream forming system, a preioniser and electrodes. The ceramic housing of the laser is made of n (n ≥ 2) cylindrical modules which are air-tightly connected to each other by gaskets in form of O-rings, primarily made of rubber which is resistant to halogen-containing gases. In a special case, (n-1) pairs of flanges made from dielectric material and bound to each other can be placed on the outer surfaces of the joints between the cylindrical modules of the ceramic housing, wherein said gaskets are placed between each of said flanges bound to each other.

EFFECT: obtaining high values of generated energy in a long-term mode.

2 cl, 2 dwg