FIELD: electricity.
SUBSTANCE: laser, preferably an eximer one, comprises a casing, where the following is installed: a gas flow generation system, a pre-ioniser, a high-voltage and a grounded electrodes. Capacitors placed in two containers installed at both sides of the plane including electrode axes are connected to electrodes via gas-permeable current conductors. Guides with cylindrical surfaces are introduced into the gas flow generation system, at the same time generatrices of the cylindrical surfaces are parallel to the axis of the body, and their edges adjoin the gas permeable current conductors. The high-voltage electrode is installed at the side of the casing wall. Containers are installed at both sides of the high-voltage electrode so that their walls facing the discharge area form a part of the gas flow generation system in the near-electrode area between the gas permeable current conductors and the high-voltage electrode. One of the laser electrodes is made as partially transparent. The pre-ioniser is installed at the side of the non-working surface of the partially transparent electrode and is made in the form of a symmetric system of sliding discharge generation on the surface of the flat dielectric plate, at the same time the body is made as metal.
EFFECT: increased efficiency factor, energy of generation and average capacity of laser radiation with higher reliability of laser operation.
2 cl, 2 dwg
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GAS-DISCHARGE LASER | 2012 |
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Authors
Dates
2012-03-27—Published
2011-01-28—Filed