FIELD: electricity.
SUBSTANCE: gas discharge laser comprises: a laser chamber comprising lengthy electrodes distanced from each other, a lengthy pre-ionisation unit; a system of gas circulation; a set of capacitors installed in ceramic containers located near the first electrode, the specified capacitors are connected to electrodes via current leads of ceramic containers and via current leads arranged at both sides of electrodes. The laser also comprises a pulse source of power supply connected to capacitors, at the same time in the laser chamber there are additional lengthy ceramic containers, each comprising additional capacitors. There are tight current leads installed in walls of each additional container along it. At the same time capacitors are connected to the second electrode via gas permeable current conductors, current leads of each additional container and additional capacitors. Outside the laser chamber there is an additional pulse source of supply, polarity of which is opposite to the polarity of the source of supply, being connected to additional capacitors.
EFFECT: making it possible to increase laser capacity.
18 cl, 3 dwg
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Authors
Dates
2014-03-20—Published
2012-07-23—Filed