FIELD: physics.
SUBSTANCE: in the gas-discharge laser, capacitors which are low-conductance connected to electrodes of the laser, are placed near the first electrode in ceramic containers and are low-inductance connected to a pulsed power supply through current leads of each container, high-voltage current leads of the metallic laser chamber and extended earthing leads, placed on both sides of the containers.
EFFECT: increasing excimer laser power.
8 cl, 5 dwg
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