FIELD: instrument making.
SUBSTANCE: optical microphone comprises a body, a membrane, fixed along its perimetre, a monochromatic source of light, a focusing lens and a photodetector. The source of monochromatic radiation and the focusing lens are installed opposite to the first end of a fibre optic light guide, and the photodetector is arranged opposite to the second end of the fibre optic light guide. The microphone membrane is made as corrugated from a thin layer of silicon nitride with thickness of 0.1 mcm, besides, light is reflected in it from a central section with the diametre of 0.4 mm produced with the help of gold application by photolithographic method.
EFFECT: higher reliability and sensitivity of an optical microphone.
3 dwg
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