OPTICAL MICROPHONE AND METHOD OF MANUFACTURING OF ITS SOUND-SENSITIVE MEMBRANE Russian patent published in 2009 - IPC H04R23/00 H04R7/00 

FIELD: physics; optics.

SUBSTANCE: invention concerns optoelectronic instrument making and microfabrication technology and can be used in a design of special purpose microminiature receivers of acoustic signals. The optical microphone contains a laser source of optical radiation 1, an interferometric sensor 2 equipped with a sound-sensitive micromembrane 3 with corrugations 3a and a light-reflective surface 3b, the optoelectronic converter 4 including a fiber-optical splitter 5, a light-receiving element 6 and an electric signal amplifier 7. The sound-sensitive goffered micromembrane is executed from the silicon nitride stoichiometric structure with a mechanical stress from 10 to 80 kPa, the planar light-reflective surface 3b is executed from Au, Pt or W. The method of manufacturing of a sound-sensitive micromembrane is in addition offered.

EFFECT: sensitivity increase, design simplification, increase operating temperature and pressure range on an interferometric sensor installation site.

3 cl, 4 dwg