FIELD: measurement equipment.
SUBSTANCE: solid-state magnetic field sensor includes piezoelectric material, on which electrodes for connection to voltage recording device are located, and magnetosensitive element connected to an alternating current source; at that, it also includes a diamond diaphragm, and piezoelectric material and magnetosensitive element are made in the form of thin films; at that, film of piezoelectric material is located above diamond diaphragm, and magnetosensitive element is located on piezoelectric material surface.
EFFECT: improving threshold sensitivity of the sensor and enlarging its dynamic range.
3 cl, 2 dwg
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Authors
Dates
2013-03-27—Published
2011-10-28—Filed