FIELD: physics.
SUBSTANCE: invention can be used for design of optical fiber magnetic field sensors. Essence of the invention is that the magnetic field converter sensor for the fiber-optic sensor has a monocrystalline silicon substrate, a membrane located above an opening made in the substrate to form a sub-membrane chamber, and planar sensitive area reflecting light, from magnetostrictive material in central area of membrane, wherein membrane comprises at least two dielectric layers having internal stresses of opposite sign, as well as on the membrane there is a corrugation relief in the form of at least one annular concentric groove.
EFFECT: providing the possibility of increasing the membrane element type sensitivity with minimum built-in mechanical stresses.
4 cl, 2 dwg
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Authors
Dates
2019-07-16—Published
2018-12-21—Filed