INDEPENDENT SELF-COOLED NANOINSTRUMENT AND ITS FORMATION METHOD Russian patent published in 2015 - IPC H01L39/24 B82B1/00 

FIELD: heating.

SUBSTANCE: invention relates to formation methods of independent self-cooled instruments and elements of electronics, which can operate effectively without using any liquid nitrogen technology and other cryogenic equipment. The formation method of an independent self-cooled nanoinstrument consists in the fact that on a substrate from monocrystalline material with a squid receiver formed on one side there arranged on the reverse side is a heat absorption device that includes a cathode and an anode, which have different Fermi energy of electrons. Then, the substrate is enclosed through an installation hole in a vacuum cover from ceramised glass which contains contact electrodes for two substrate sides. After that, the substrate installation hole is closed with a cover from ceramised glass. This device is arranged in a vacuum chamber in which a target from ceramised glass is arranged as well. Pumping-out to the pressure of 10^-1 Pa is performed; the target and the cover from ceramised glass is heated up to 450÷500°C. Then, by means of a laser with wavelength of radiation equal to 1.06 mcm, pulse duration of 10-20 ns and pulse repetition frequency of 10 Hz, power density of 5·10⁸÷8·10⁸ W/cm² there the target from ceramised glass is sprayed, which is located at the distance of 8÷10 mm from the cover from ceramised glass during 10 minutes.

EFFECT: invention provides creation of such design of a squid (a superconducting quantum interference device), in which the following is excluded: degradation of superconducting properties in the air medium, dependence of achievement of operating temperature on use of liquid nitrogen or other external cryogenic units with large dimensions.

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