DEVICE FOR GAS DYNAMIC SPUTTERING OF COATINGS FROM POWDER MATERIALS Russian patent published in 2013 - IPC C23C24/04 

FIELD: machine building.

SUBSTANCE: device includes powder feeders, a carrier gas source used for acceleration of particles of powder material, a sputtering unit including a casing, carrier gas electric heater located in the casing and connected via a gas line to the carrier gas source, an accelerating nozzle, a microprocessor monitoring and control unit of the specified temperature of carrier gas with a control element and a device for mixing powder material with carrier gas, which is connected to the accelerating nozzle. The casing of the sputtering unit has internal partition walls with labyrinth channels formed between them and external walls of the casing for passage of a carrier gas flow with its being heated to the temperature specified with the microprocessor unit.

EFFECT: device has lower power consumption and provides high quality of coatings due to temperature stabilisation and monitoring.

1 dwg