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2 483 388

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(51)

IPC

H01L21/3213(2006-01-01)

H01L21/66(2006-01-01)

B82B3/00(2006-01-01)

(21) (22)

Application

2011149382/28, 2011-12-06

(24)

Start date

2011-12-06

(22)

Actual filing date

2011-12-06

(45)

Published

2013-05-27

(72)

Inventor

Karpov Jurij AleksandrovichGlavin German Grigor'EvichDal'Nova Ol'Ga Aleksandrovna

(73)

Holder

Otkrytoe Aktsionernoe Obshchestvo Nauchno-Issledovatel'Skij I Proektnyj Institut Redkometallicheskoj Promyshlennosti

METHOD OF PRODUCING NANOSIZED THIN-FILM STANDARD SAMPLE OF CHEMICAL COMPOSITION Russian patent published in 2013 - IPC H01L21/3213 H01L21/66 B82B3/00

Abstract RU 2483388 C1

FIELD: chemistry.

SUBSTANCE: in order to obtain a nanosized thin-film standard sample of a chemical composition of an inorganic substance or material by spark source mass spectrometry, successive removal of nanolayers of the sample and determination of the thickness and chemical composition of each removed layer before formation of the nanolayer whose chemical composition is identical to the chemical composition of the previous removed nanolayer is carried out; that chemical composition of the nanolayer is metrologically certified and the surface nanolayer formed is used as a thin-film standard sample of nanomaterial for calibrating devices and checking accuracy of chemical analysis.

EFFECT: invention enables to obtain a standard thin-film sample which can be used for quantitative measurement of impurity composition of different nanosized films.

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RU 2 483 388 C1

Authors

Karpov Jurij Aleksandrovich

Glavin German Grigor'Evich

Dal'Nova Ol'Ga Aleksandrovna

Dates

2013-05-27—Published

2011-12-06—Filed