FIELD: physics.
SUBSTANCE: invention relates to mass analysis of ion flux emitted from the surface of a solid-state body under the effect of primary radiation, and can be used to improve analytical properties of mass spectrometers used to analyse solid-state micro- and nanoelectronic objects by secondary ion and laser mass spectrometry techniques. The iso-trajectory mass spectrometer of charged particles provides fourth-order angular focusing of the "axis-ring" type with a centre angle of about 40°, which enables to achieve luminosity of Ω/2π on the order of values of 10%, therefore significantly exceeding the practically allowable level of sensitivity in mass analysis of a substance.
EFFECT: improved sensitivity of mass spectrometers.
1 dwg
| Title | Year | Author | Number |
|---|---|---|---|
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SU1275587A1 |
