FIELD: physics.
SUBSTANCE: method of obtaining three-dimensional objects of an arbitrary shape by interference lithography involves preliminary calculation of amplitude and phase of the interfering coherent waves on a given shape of the object, illuminating a photosensitive material with a series of groups of interfering coherent waves to obtain three-dimensional distribution of density of absorbed light energy, developing the obtained photomaterial and obtaining solid three-dimensional objects.
EFFECT: synthesis of three-dimensional objects of an arbitrary shape with subwave resolution.
22 cl, 9 dwg
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