ELECTRODISCHARGE DETECTION METHOD OF MICROLEAKAGES OF WATER VAPOR Russian patent published in 2013 - IPC G01M3/40 

FIELD: test engineering.

SUBSTANCE: on exposure to the chamber wall of plasma or flow of electrons the decomposition of outflowing water vapor is carried out, the electronically excited molecules of hydroxyl OH(A²Σ) are formed, which emission spectrum is recorded by the spectral instrument. The intensity of emission is proportional to the rate of leakage, respectively, the rate of leakage can be measured by the amount of the detected signal. The method enables to detect leakage at a level 3·10^-5 Pa·m³s^-1.

EFFECT: rapid non-contact detection of microleakages in them, both in the process of treatment of the inner surface of the chamber with the auxiliary discharge, and directly in the normal operation mode of installation.

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