FIELD: physics.
SUBSTANCE: analysed material is illuminated with a coherent source through a diffraction optical element; a plane-parallel plate is cut from the analysed material and rotated; obtained images are taken and compared with reference images, after which parameters of observed symmetry distortions are measured, from which optical parameters are determined. Rotation is carried out from -45° to 45°, and measurements are taken every 5°.
EFFECT: invention increases accuracy of the inspection.
2 cl, 2 dwg
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