FIELD: process engineering.
SUBSTANCE: invention relates to thin-film glass-ceramic coatings used in science of materials and medicine. Proposed method comprises preparing film-forming solution, applying first layer of said solution of silicon substrate, second said layer and, once more, said first layer. Every said layer applied, stepwise thermal treatment is performed at 60°C for 30 min and, then, stabilisation annealing is performed at 700°C for 1 h. Composition of said first film-forming solution includes zirconium oxochloride and 96 wt % of ethyl alcohol. Composition of second film-forming solution includes tetra ethoxysilane, calcium chloride, orthophosphoric acid and 96 wt % of ethyl alcohol.
EFFECT: stable coat with high refractive index and thickness over 100 nm.
3 cl, 3 ex
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