DEVICE FOR MEASURING CAPACITANCE OF SEMICONDUCTOR DEVICE Russian patent published in 2013 - IPC G01R27/00 

FIELD: measurement equipment.

SUBSTANCE: device for measuring capacitance of a semiconductor device includes a semiconductor device, a capacitance-voltage converter, the first analogue-to-digital converter, as well as it additionally includes a phase shift metre, a calculation unit and a control unit; with that, the capacitance-voltage converter is made in the form of a gyrator of electric impedance, which performs conversion of capacitance to phase shift of voltage and the first analogue-to-digital converter is located in the phase shift metre.

EFFECT: reduction of a measurement error of capacitance of a semiconductor device at test signal frequency of 1 kHz, test signal amplitude of 10 mV and direct current through a semiconductor device of up to 1 mA.

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