FIELD: measurement equipment.
SUBSTANCE: method to measure threshold voltage of a device based on micromechanical systems, according to which voltage differences are applied to the device, and quantity of the change is measured, which is sent to the device as at least one of the specified voltage differences is applied, on the basis of the measured charge it is determined whether each of the specified voltage differences varies the device condition, and threshold voltage is determined on the basis of the voltage difference, which causes condition variation. The device on the basis of microelectromechanical systems made as capable of transition into activated state under action of the activating voltage, possibility of transition into the disconnected condition under action of the disconnecting voltage and possibility to preserve the existing condition under action of retention voltage, comprising the first and second facilities of activation and disconnection in accordance with voltage, facilities of application of voltage differences into the first and second facilities of activation and disconnection, facilities of indication of charge quantity supplied to the device as at least one voltage difference is applied, facilities for determination on the basis of the measured charge whether condition of the device changes under action of at least one voltage difference and facilities to determine threshold voltage on the basis of voltage difference causing condition variation.
EFFECT: higher accuracy of threshold voltage measurement.
41 cl, 35 dwg
