METHOD AND DEVICE TO MODIFY SURFACE OF AXISYMMETRIC ITEMS Russian patent published in 2014 - IPC H01J3/04 

FIELD: electricity.

SUBSTANCE: processed axisymmetric item in the form of a grounded cathode is placed into a chamber filled with working gas, into magnetic field and with a cylindrical anode under electric potential in gas discharge with the purpose to produce modes of treatment and etching, high anti-corrosion, tribological and mechanical properties, the axisymmetric item is arranged coaxially with the axisymmetric composite anode, with variable geometry depending on the shape and dimensions of the processed surface, in crossed axisymmetric radially directed electric and longitudinal magnetic fields, an adjustable radially reconvergent ion flow is created in the interval of energies from 0.5 to 5 keV and pressure of the working gas from 10^-2 to 100 Pa. For this purpose they arrange coaxially insulated electrodes at the ends, which are under automatically adjustable electric potential, they generate a longitudinal axially symmetric homogeneous magnetic field, and the processed item is longitudinally displaced with axial turn (rotation). The device comprises a magnetic system and a vacuum chamber, inside which there is a cathode and a cylindrical anode, the cathode is arranged axisymmetrically inside the anode, at the ends of which there are coaxially insulated reflecting electrodes, the cathode is an axisymmetric item, the surface of which is exposed to processing.

EFFECT: increased energy efficiency.

3 cl, 1 dwg