MAGNETRON SPRAYER WITH THERMOELECTRONIC IONIZER Russian patent published in 1995 - IPC

FIELD: this film microelectronics. SUBSTANCE: cathode has cavity in which hot cathode is installed. Installed above cavity is reflecting screen. Thermoelectronic emitter ensures emission of electrons into zone of magnetic trap that provides for efficient ionization of working gas. This requires uniform introduction of electrons into ionization zone that is attained by symmetrical arrangement of hot cathode and anode relative to annular plasma zone. Anode, magnetic system cavity and screen in the device are axisymmetric and magnetic system is always located between anode and cavity. EFFECT: higher efficiency and stability of operation at reduced working pressure. 4 cl, 2 dwg