FIELD: parts surface modifying equipment.
SUBSTANCE: invention relates to the field of equipment for modifying the surface of parts in a low-temperature gas-discharge plasma and can be used in ion-plasma processes for cleaning, activating and alloying the surface of parts. The installation for ion nitriding in glow discharge plasma contains a vacuum chamber and a forevacuum pump connected to it and a gas flow control unit to which cylinders with gases are connected, electrodes for glow discharge excitation installed in the working space of the chamber, an anode and a cathode substrate connected to discharge power source. Said installation contains an electromagnetic system installed under the cathode substrate, with the possibility of simultaneous generation of crossed electric and magnetic fields in the chamber, providing the formation of a toroidal region of electron rotation, in which nitrogen plasma of increased density is formed.
EFFECT: increased speed and efficiency of ion nitriding in low-temperature gas-discharge plasma.
1 cl, 3 dwg
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