GAS-DISCHARGE LASER AND METHOD OF GENERATING RADIATION Russian patent published in 2014 - IPC H01S3/03 

FIELD: physics, optics.

SUBSTANCE: invention relates to laser engineering. The laser, preferably an excimer laser, includes a laser chamber consisting of ceramic material and having elongated first and second electrodes, the first of which is situated near the inner surface of the laser chamber, a pre-ionisation unit; a gas circulation system; a set of capacitors situated outside the laser chamber, and a power supply connected to the capacitors. Elongated ceramic containers housing additional capacitors are placed near the second electrode. The capacitors and the additional capacitors are connected in series to each other through earthed gas-permeable reverse current lead situated on both sides of the electrodes and are connected to the first and second electrodes through leads of the laser chamber and leads of the ceramic containers.

EFFECT: increasing laser power and reducing the cost of generating energy.

13 cl, 3 dwg