FIELD: physics, optics.
SUBSTANCE: invention relates to laser engineering. The discharge system of an excimer laser includes a space discharge area (4) in a laser chamber (1) between first and second electrodes (2), (3), the longitudinal axes of which are parallel to each other; each preionisation unit (5) comprises a system for generating uniform complete creeping discharge on the surface of an extended dielectric plate (6), having an arched shape in the cross-section. The arched dielectric plate (6) can be in the form of a dielectric tube.
EFFECT: enabling laser energy and power increase.
21 cl, 13 dwg
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