FIELD: electricity.
SUBSTANCE: device for thermochemical treatment of parts in non-self-maintained glow discharge contains a vacuum chamber with substrate for parts placement, a power supply source connected by its negative pole to the substrate and by its positive pole to the chamber body, a thermionic electrode and the second power supply source connected by its negative pole to the thermionic electrode substrate and by its positive pole to the chamber body. The thermionic electrode is made as a step-like Fresnel phase zone plate with oscillation phase of its even zones changing per π. The formulas are specified to determine a value of a step and disc radius for Fresnel phase zone plate.
EFFECT: increasing durability of parts.
2 dwg
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